| 摘要 |
The invention relates to a method for obtaining of superporous layers of electroconductive materials using vacuum spraying of a material. A target made of material being precipitated is sprayed in the area of crossed electric and magnetic fields. The sprayed atoms are ionized and turned to the target under action of return diffusion and return dispersion, and precipitated on a substrate which is fastened in the central part of the target and cooled by water. Energy of particles are averaged and reduced to a level, which not exceeds the boundary energy of spraying of crystal condensed material due to non-expendable collisions of atoms of sprayed substance with atoms of operation gas and their collisions among themselves, at movement from the target up to the substrate.On extended surface both ions of sprayed substance, and ions of operation gas neutral atoms act, and it leads to that the adatoms not chemically bonded sufficiently with the extended surface, will be repeatedly evaporated and sprayed. A method allows obtaining of superporous layers of any conducting materials, at increased rates of growing of the layer, and enables to give control at microlevel process of condensation and obtain layers with different "architecture". |
