| 摘要 |
<p>PURPOSE: An apparatus for removing an edge bead for manufacturing a substrate is provided to minimize waste fluid remaining in the substrate and improve the efficiency of an EBR(Edge Bead Removal) process, and prevent the deterioration in manufacturing the substrate. CONSTITUTION: A fixing stand(100) straightly and rotatively moves, and fixes a substrate(110) thereon. A medicinal fluid injecting part(200) sprays a medicinal fluid to dissolve an edge bead formed at an edge of the substrate. An exhaust port(300) is placed adjacent to a side of the substrate for sucking in and exhausting the dissolved edge bead. An exhaust port(400) is communicated with the exhaust port for applying exhaust pressure generated in an exhaust pump to the exhaust port. The exhaust port is formed in a slot shape and the exhaust pope is formed in a funnel shape, so that the exhaust performance of waste liquid including the dissolved edge bead is reinforced.</p> |
