| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical interference filter capable of easily obtaining desired optical characteristics. SOLUTION: The optical interference filter comprises a cavity structure in which a spacer layer 13' is interposed between first and second stacks 11, 12 made by alternately stacking high-refractive index layer H and low-refractive index layer L respectively, wherein the spacer layer 13' is configured such that two layers 13a, 13b are joined by the optical contact. Cavities 10 are held by the first and second substrates 20, 30, the first stack 11 and the layer 13a are film-formed on the first substrate 20, and the second stack 12 and the layer 13b are film-formed on the second substrate 30. The thickness of the spacer layer can be corrected (additionally film-formed) and the compensation of film thickness error is permitted. COPYRIGHT: (C)2008,JPO&INPIT
|
