| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of measuring a deckle edge accurately and surely, and grasping a deckle edge profile easily. SOLUTION: The apparatus is equipped with: a horizontally moving stage; a rotating stage; a base block thereon; a fixing chuck; a vertically moving stage disposed on the rotating stage side; and a contact-type sensor member supported thereby. A work is supported so as to rotate freely along with rotations of the base block, and the sensor member which contacts with an edge portion of the work being cup-shaped, is brought to contact with the whole edge of the work along with the rotations of the work, whereby height values of edges of the work can be measured unexceptionally for respective rotational positions. COPYRIGHT: (C)2008,JPO&INPIT
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