OPTISCHE BAUELEMENTE MIT DÜNNEN FERROELEKTRISCHEN FILMEN

摘要

A method of producing a device with a ferroelectric crystal thin film on a first substrate including the steps of providing a ferroelectric crystal, of irradiating a first surface of the ferroelectric crystal with ions so that a damaged layer is created underneath the first surface, of bonding a block of material including the first substrate to the ferroelectric crystal to create a bonded element, wherein an interface is formed between the first surface and a second surface of the block, and of heating the bonded element and separating it at the damaged layer, so that a ferroelectric crystal layer remains supported by the first substrate. By this method, very thin films-down to thicknesses of a fraction of a micrometer-of ferroelectric crystals may be fabricated without jeopardizing the monocrystalline structure.