MICROMIRROR DEVICE HAVING A VERTICAL HINGE

摘要

A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.