| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system in which outputs of as many drive systems as possible can be used when a lithographing position moves from one target to next target on a substrate. <P>SOLUTION: The drive system plays a role in moving a substrate, for example, in a lower location of an illumination system or a measuring radiation beam. The first drive system drives the substrate in a direction of X, and the second drive system drives the substrate in a direction of Y. Targets are arranged in a lattice form in order to measure a form of a surface of the substrate. It is not performed that directions of the lattice are aligned along the direction of X and the direction of Y and thereby only one drive system is required to act for moving a lithographing position from one target to next target, but it is performed that the directions of the lattice are aligned along directions having some angles to the X and the Y axes and thereby both the drive systems are required to act for moving a lithographing position between targets. Also targets (or sub-targets in a target) can be reciprocally arranged in such a way that spaces of scribing lanes are saved and the routes most economical are formed among them. <P>COPYRIGHT: (C)2008,JPO&INPIT |
