| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an image sensor that can be improved the sensitivity by making into zero gap a space between adjacent lenses constructing a microlens. <P>SOLUTION: The method of manufacturing image sensor includes a step of forming a photo sensitive film for forming a microlens on a color filter, a step of forming a pattern having a predetermined depth from upper plane by exposing the photosensitive film, a step of forming a backup microlens by heat treating the photosensitive film, and a step of forming a microlens by etching the backup microlens. <P>COPYRIGHT: (C)2008,JPO&INPIT |
