发明名称 |
SAPPHIRE SUBSTRATES AND METHODS OF MAKING SAME |
摘要 |
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 mum/cm<SUP>2</SUP>, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
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申请公布号 |
US2008164458(A1) |
申请公布日期 |
2008.07.10 |
申请号 |
US20070963420 |
申请日期 |
2007.12.21 |
申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
TANIKELLA BRAHMANANDAM V.;SIMPSON MATTHEW A.;CHINNAKARUPPAN PALANIAPPAN;RIZZUTO ROBERT A.;VEDANTHAM RAMANUJAM |
分类号 |
B24B7/04;H01L29/04;H01L33/00 |
主分类号 |
B24B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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