| 摘要 |
A microscope system comprises a microscope for observing a sample, a stage on which the sample is mounted, a stage driving unit for moving the stage, and a control unit for controlling the stage driving unit in such a way that acceleration generated by a movement of the stage does not exceed a predetermined value, when the stage is moved with respect to the optical observation axis of the microscope and the stage is relatively scanned by the optical axis.
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