摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor light detecting element wherein the occurrence of crosstalk can be suppressed sufficiently, and to provide a radiation detector. <P>SOLUTION: A photo diode array PD1 comprises an n-type semiconductor substrate with the one face being an incident plane for a light to be detected, a plurality of photosensitive regions 3 consisting of a plurality of pn-junction type photo diodes which are formed on the detection plane side opposite to the incident plane of the semiconductor substrate, and a carrier trapping portion 12 formed between adjacent photosensitive regions 3 out of the plurality of photosensitive regions 3. The carrier trapping portion 12 has such a structure that one or a plurality of carrier trapping regions 13, each including a pn-junction, are arranged being spaced apart from each other. <P>COPYRIGHT: (C)2008,JPO&INPIT |