| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage-stacking tray and a tray delivery device of the size corresponding to the number of plates required by a processor and the number of plates stored in a cassette. SOLUTION: The stage-stacking tray 22 is vertically divided by a claw 28 by a support means of arranging a transfer device 26 and a freely advancing-retreating/lifting claw 28 in a tray storage part 24 of an unmanned carrier 20. COPYRIGHT: (C)2008,JPO&INPIT
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