发明名称 APPARATUS FOR MEASURING THREE-DIMENSIONALS
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for measuring three-dimensions adaptable to various object to be inspected, by flexibly changing the color or the pattern of an irradiation light. SOLUTION: This three-dimensional measuring apparatus comprises a spectroscopic section, an optical space modulating section, a projection section, an image capture section, and an image analysis section. The spectroscopic section generates a spectrum light. The optical space modulation section flexibly changes the color pattern of an irradiation light by space modulation of the spectrum light. The projection section projects the irradiation light to an object to be inspected. The image capture section captures the projected image of the object to be inspected from a direction different, from the projecting direction of the irradiation light. The image analysis section detects the position and the color of the pattern from the captured image and detects the three-dimensional shape of the object to be inspected based on the position and the color. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008157888(A) 申请公布日期 2008.07.10
申请号 JP20060350068 申请日期 2006.12.26
申请人 NIKON CORP 发明人 AOTO KAZUAKI
分类号 G01B11/25 主分类号 G01B11/25
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