| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required for a process by lowering the viscosity of a photoradical polymerizable monomer composition used in optical nano-imprint. SOLUTION: This nano-structure is a microstructure with the minimum working dimension of 1,000 nm or less, and the microstructure is composed of a thermoplastic polymer consisting of a copolymer of a vinyl ether compound and an acrylate compound or a methacrylate compound. The nano-structure can be integrated with a substrate, or formed on a support together with the substrate or independently. The nano-structure can be obtained by polymerizing a composition including the vinyl ether compound, the acrylate ester compound or the methacrylate compound, and a photoradical polymerization catalyst. COPYRIGHT: (C)2008,JPO&INPIT |
