发明名称 DEVELOPMENT PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a development processor, by which a running cost can be reduced while removing scum and a cost for a capacity investment can be cut. SOLUTION: Developer 3 after performing a development processing in a development processing portion 5 is made to flow into a developing tank 1. At this time, bubbles 9 to which the scum sticks are generated on the surface of the developer 3. The bubbles 9 generated one after another have their escape cut off and are naturally pushed out upwardly in a narrow space partitioned with a division plate 6. That is, by providing the division plate 6 to reduce the volume of a space where the bubbles 9 can exist, a pushing force of the bubbles 9 themselves is increased and the bubbles 9 move above the developing tank 1 according to natural pushing force generated in the bubbles 9 themselves. The bubbles 9 are naturally ejected to piping 7 from an upper part of the developing tank 1. The ejected bubbles 9 go into a scum removing portion 8, and the bubbles 9 to which the scum sticks are removed from a waste line. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008159921(A) 申请公布日期 2008.07.10
申请号 JP20060348152 申请日期 2006.12.25
申请人 HITACHI PLASMA DISPLAY LTD 发明人 KAMIMURA KAZUHIDE;NOMA HIROSHI
分类号 H01L21/027;G03F7/30 主分类号 H01L21/027
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