| 摘要 |
PROBLEM TO BE SOLVED: To increase a workpiece transportation accuracy and a workpiece transportation efficiency in a stage apparatus. SOLUTION: The stage apparatus 10 comprises a horizontally movable moving object 20, a rest 30 for supporting a platen 22 along which the moving object 20 is moved, a suction table 50 for sucking a workpiece 40, and a transportation unit 60 for feeding in or out the workiece 40. The transportation unit 60, which has a base 61 integrally fixed to the rest 30, has a transportation function of feeding in or out the workpiece 40 and a position adjustment function of adjusting the position of the workpiece 40 relative to a suction surface 52 by rotating the workpiece 40 in a horizontal direction (θz direction). The transportation unit 60 has an upper stage unit 62 located in upper and lower 2 stages and a lower stage unit 64 for feeding out of the workpiece. The transportation unit 60 further feeds in or out the workpiece 40 relative to the suction table 50 by lifting or lowering the upper stage unit 62 and a lower stage unit 64 at both sides in an X direction. COPYRIGHT: (C)2008,JPO&INPIT
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