| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solid-phase sheet which can attain continuous production by suppressing solidification caused in the vicinity of an interface between the inner wall of a crucible and a semiconductor material melt. SOLUTION: In the method of manufacturing a solid-phase sheet on the surface of a substrate by charging a semiconductor material melt into a crucible and immersing the substrate in the semiconductor material melt, a radiation reflector contacted with both of the upper surface of the crucible and the outer side surface of the crucible is provided, the radiation reflector comprises a radiation reflecting part which can reflect a radiation from the semiconductor material melt, and the radiation reflecting part is positioned directly above the semiconductor material melt. COPYRIGHT: (C)2008,JPO&INPIT
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