CONVEYOR OF SURFACE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a conveyor of a surface processing device wherein substrate material is: prevented from winding; prevented from occurring of a corner folding; prevented from being distorted and marked; prevented from dropping; improving conveyance capacity; avoiding warping and curling and the like and improving under spray efficiency. SOLUTION: This conveyor 8 is used in the surface processing device 6 for processing the substrate material A while conveying it during a manufacturing process of a substrate. For each rotation driving shaft 14, many conveyance rollers 13 are mounted alternatively with many free rollers 15. The conveyance rollers 13 are mounted and fixed on the rotation driving shaft 14 and the free rollers 15 are freely mounted on the rotation driving shaft 14 and occupy right-left gap spaces between the conveyance rollers 13. The respective conveyance rollers 13 and the free rollers 15 form a vertical wave curved surface F by the collective whole. COPYRIGHT: (C)2008,JPO&INPIT