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发明名称
Schicht aus Si<SUB>1</SUB><SUB>-</SUB><SUB>x</SUB>Ge<SUB>x</SUB>, Verfahren zu deren Herstellung und mikromechanisches Bauelement damit
摘要
申请公布号
DE10260860(B4)
申请公布日期
2008.07.10
申请号
DE2002160860
申请日期
2002.12.23
申请人
ROBERT BOSCH GMBH
发明人
FREY, WILHELM;GOMEZ, UDO-MARTIN;LAERMER, FRANZ;KRONMUELLER, SILVIA;DUENN, CHRISTOPH
分类号
B81B3/00;B81C1/00;C23C16/01;C23C16/30;C23C16/56;C30B25/02;H01L21/20
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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