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发明名称
x-ray or XUV generation unit
摘要
申请公布号
EP1760760(A3)
申请公布日期
2008.07.09
申请号
EP20060016388
申请日期
2006.08.05
申请人
COMET GMBH
发明人
REINHOLD, ALFRED
分类号
H01J35/14
主分类号
H01J35/14
代理机构
代理人
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