发明名称 LAMP FAILURE DETECTOR
摘要 A lamp failure detector is provided to detect lamp failure for an array of lamps used to produce radiation for a thermal processing. A lamp failure detector includes a data acquisition(DAQ) module(108) and a controller(110). The DAQ module samples voltage signals at different sampling positions along a circuit path formed by a group of serially connected lamps in an array. The controller detects a failure in at least one lamp based on voltage drops across at least two lamps, and determined by the sampled voltage signals. The group of serially connected lamps includes more than two lamps. The controller detects an open circuit condition of a first lamp based on a zero voltage drop across a second lamp.
申请公布号 KR20080064731(A) 申请公布日期 2008.07.09
申请号 KR20080000663 申请日期 2008.01.03
申请人 APPLIED MATERIALS INC. 发明人 SEREBRYANOV OLEG V.;GOLDIN ALEXANDER;RANISH JOSEPH MICHAEL
分类号 H01L21/324 主分类号 H01L21/324
代理机构 代理人
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