THIN FILM COATING APPARATUS

摘要

A thin film coating apparatus is provided to cut down the manufacturing cost by excluding a vacuum chamber and devices driving the vacuum chamber and to coat a thin film uniformly by coating a base film with liquid material by one or two liquid material sprayers. A thin film coating apparatus(100) is composed of: a base film transfer device(110); at least one liquid material sprayer(120) disposed at one side of the transfer device and equipped with a plurality of nozzles(122) for jetting liquid material containing coating materials, on one surface of a base film(5); and a transfer coating device(130) comprising a coating unit(140) and a rolling unit(150). The coating unit coats the base film with the coating material of the liquid material jetted from the nozzles of the liquid material sprayer. The rolling unit is disposed at the outer side of the coating unit to transfer the base film separately from the coating unit.