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发明名称
摘要
申请公布号
JP4115243(B2)
申请公布日期
2008.07.09
申请号
JP20020313685
申请日期
2002.10.29
申请人
发明人
分类号
H01L21/28;H01L29/866
主分类号
H01L21/28
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