MANUFACTURING METHOD OF RESONANCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a resonance device with high performance that can suppress generation of crosstalk between resonators via an acoustic mirror and is easy to manufacture.

SOLUTION: The acoustic mirror 2 is formed by alternately repeating a stage of forming a low acoustic impedance layer 21 of an insulating thin film on one surface side of a support substrate 1 and a stage of forming a high acoustic impedance layer 22 of an insulating carbon thin film. A conductive layer 31a as a base for lower electrodes 31 of respective resonators 3 is formed on the entire top side of the acoustic mirror 2, a PZT thin film 32a is formed on the entire top side of the conductive layer 31a in a sol-gel method and then patterned to form a plurality of piezoelectric thin films 32 of portions of the PZT thin films 32a respectively, and the conductive layer 31a is patterned to form a plurality of lower electrodes 31 of portions of the conductive layer 31a respectively, where upper electrodes 33 are formed on respective top sides of the respective PZT thin films 32.

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