| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the dimension of a specimen using an electron microscope, eliminating the influence of failure in autofocusing and accurately measuring the dimensions of a specimen feature structure. SOLUTION: This electron microscope has an object lens 151b for focusing an electron beam onto the specimen, a lens control part 150b for supplying an exciting current supplied to the focusing lens 151b, and a host computer 102 for measuring the feature structure. The host computer 102 varies the exciting current which is supplied to the focusing lens 151b and obtains dimension data of the feature structure of the specimen at each of the exciting currents which is supplied to the focusing lens 151b. The dimension data where the variation indicating a change in the dimension data obtained by the measurement is below a predetermined value is determined to be the dimension of the feature structure of the specimen. COPYRIGHT: (C)2008,JPO&INPIT
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