| 摘要 |
PROBLEM TO BE SOLVED: To enable temperature compensation to an output so as to correspond to a temperature of an acceleration detection element accurately with a simple constitution, in an acceleration sensor. SOLUTION: This acceleration sensor has a constitution having a weight part formed integrally with a semiconductor substrate; a support for side enclosing the weight part; flexible parts each one end of which is bonded to the weight part, and each other end of which is bonded to the support side, and an acceleration detection element having a piezoelectric resistance effect on a bonding part between the weight part and the support side of the flexible part. The sensor is constituted so that at least one semiconductor temperature sensor utilizing temperature dependency of a forward direction bias voltage of a P-N junction is formed on the semiconductor substrate, and that temperature compensation is performed to an output from the acceleration detection element by temperature information determined by the semiconductor temperature sensor. COPYRIGHT: (C)2008,JPO&INPIT
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