发明名称 |
ZUSAMMENSETZUNG ZUR ERZEUGUNG EINES PHOSPHINHALTIGEN GASES |
摘要 |
A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping. |
申请公布号 |
AT403629(T) |
申请公布日期 |
2008.08.15 |
申请号 |
AT19960108969T |
申请日期 |
1996.06.05 |
申请人 |
DEGESCH DE CHILE LTDA |
发明人 |
HORN FEJA, FRANZISKUS DR;REICHMUTH, CHRISTOPH |
分类号 |
A01M17/00;C01B25/08;A01N25/18;A23B9/18;A23L3/3409;A23L3/358;B01J4/00;B01J7/02;B01J19/14;C01B25/06;C07F9/00 |
主分类号 |
A01M17/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|