发明名称 |
Integration of automated cryopump safety purge |
摘要 |
A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.
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申请公布号 |
US7415831(B2) |
申请公布日期 |
2008.08.26 |
申请号 |
US20050136325 |
申请日期 |
2005.05.23 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
AMUNDSEN PAUL E.;BUONPANE MAUREEN C.;ANDREWS DOUGLAS;JACOBS JORDAN |
分类号 |
B01D8/00;F04B37/08;F04B49/06 |
主分类号 |
B01D8/00 |
代理机构 |
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代理人 |
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地址 |
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