发明名称 |
Method and apparatus for measuring surface carrier recombination velocity and surface Fermi level |
摘要 |
A pump beam irradiates the surface of a semiconductor sample through modulator while irradiating the surface with a probe beam so that a detector measures a light-modulated spectrum of the probe beam reflected from the surface of the semiconductor sample. Then, surface electric field strength is calculated from the period of Franz-Keldysh oscillations appearing in the light-modulated spectrum, and the surface recombination velocity and surface Fermi level are calculated based on a relation between the surface electric field strength and the probe beam power density.
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申请公布号 |
US7420684(B2) |
申请公布日期 |
2008.09.02 |
申请号 |
US20050256180 |
申请日期 |
2005.10.24 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
TAKEUCHI HIDEO;YAMAMOTO YOSHITSUGU |
分类号 |
G01N21/00;G01N21/55 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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