METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED CLOCK

摘要

PROBLEM TO BE SOLVED: To efficiently mass-produce high quality and high performance piezoelectric vibrating pieces having low CI value.

SOLUTION: The method of manufacturing a piezoelectric vibrating piece includes steps of: forming a first protective film 20 on both faces of a piezoelectric plate 20; patterning the first protective film into the external shape of a piezoelectric vibrating piece with areas of groove parts 5 reserved; processing the piezoelectric plate by dry etching with the first protective film as a mask to form groove parts and etching areas not masked with the first protective film by a depth h1 of the groove parts from the surface of the piezoelectric plate; protecting the groove parts by formation of a second protective film; processing the piezoelectric plate by wet etching with the first and second protective films as a mask, completely removing remaining parts of the piezoelectric plate etched up to the depth of the groove parts from the surface and forming a pair of vibrating arm parts and a base part; and removing the first and second protective films.

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