| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal device with which the pretilt angle etc. of a liquid crystal are certainly controlled, and whose reliability is improved, by utilizing a new inorganic material based alignment layer. SOLUTION: In an IPS mode or FFS mode liquid crystal device, when alignment layers 15, 25 are to be formed on an element substrate 10 and on a counter substrate 20, a base film 41, for forming a plurality of rows of projections and recessions with rectangular sections aligned in parallel to one another like stripes, is formed and subsequently a silicon oxide film 43 is deposited with a HDPCVD (High Density Plasma Chemical Vapor Deposition) method so as to cover the base film 41 for forming projections and recessions. In reference to the silicon oxide film 43, wedge-shaped top portions 42 are formed above the base film 41 for forming projections and recessions, and the silicon oxide films 43 thus formed are utilized as the alignment layers 15, 25. COPYRIGHT: (C)2008,JPO&INPIT |
