| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for performing fine processing in a manufacturing method of a piezoelectric vibrator. <P>SOLUTION: Half-etching by dry etching is performed after performing full etching by wet etching to first and second surfaces 12, 14 mutually turning to the opposite side of a piezoelectric body 10. A covered area by a wet etching resist 50 includes a base part 16 and an area for forming a pair of vibration arms 18 extending from the base part 16. An exposed area from the wet etching resist 50 includes an area for forming a pair of notches 22 in the opposite direction of the base part 16 so that the bundled shape appears on the first and second surfaces 12, 14. An exposing exposed area from a dry etching resist 54 includes an area for forming a groove 36 and an area for forming the pair of notches 22 in the pair of vibration arms 18. <P>COPYRIGHT: (C)2008,JPO&INPIT |
