| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability of a piezoelectric actuator of a lower addressing constitution. <P>SOLUTION: The method for manufacturing a piezoelectric actuator includes a step (A) for processing the top of an insulating substrate 31 into a concave-convex surface having concave parts 36 and convex parts 37, steps (B) and (C) for forming a bottom electrode film 32 as an individual electrode in the concave parts 36 of the insulating substrate 31 for forming a smooth and flat surface with the top of the bottom electrode film 32 and the top of the convex parts 37 of the insulating substrate 31, a step (D) for forming a piezoelectric film 33 on the flat surface and a step (E) for forming an upper electrode film 34 on the piezoelectric film 33. A smooth and flat surface may be formed with the top of a bottom electrode film 32 and the top of convex parts of a concave-convex film by forming the concave-convex film on one side of a substrate and forming a bottom electrode film 32 in the concave parts of the concave-convex film. Also, a smooth and flat surface may be formed with the top of a level difference absorbing film and the top of a bottom electrode film 32 by forming the level difference absorbing film having the same thickness as the thickness of the bottom electrode 32 in a region of a substrate where the bottom electrode film 32 is not formed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
