| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a particle optical component and a particle optical system which can operate a charged particle fine beam in high accuracy. <P>SOLUTION: The particle optical device provides a primary electron beam passage 13 for a primary electron beam for an object 7 and a secondary electron beam passage 11 up to a detecting unit 200 from the object 7, and the particle optical device is provided with an electron source unit 301 in which the primary electron beam passage 13 reaches the object 7 from the electron source unit 301, a first focusing lens providing a focusing field, an object lens 102, and a beam splitter combiner unit 400 which is arranged in the primary electron beam passage 13 between the electron source unit 301 and the object lens 102 and in the secondary electron beam passage 11 between the object lens 102 and the detecting unit 200. The object lens 102 provides the focusing field for the electron of the primary electron beam and the electron of the secondary electron beam, and the electron source device 301 is arrange in the magnetic field given by the first focusing lens. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
