| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device capable of easily transporting between a substrate processing device and the carrying device having different heights, and enabling a substrate after transportation to be adjusted in a posture suitable for the next process, in a carrying process carrying the substrate. SOLUTION: The carrying device 1 comprises a roller conveyer portion 10 having a plurality of rollers, and a plurality of rail portions equipped with the rollers and arranged at predetermined intervals, and horizontally carrying a rectangular substrate N; a vertically moving mechanism portion 3 moving the roller conveyer portion 10 in a vertical direction; and a pair of adjusting portions disposed on opposite end portion sides of the substrate N, and adjusting the posture of the substrate N by pushing the end portions of the substrate N on the roller conveyer portion 10. The vertically moving mechanism 3 is disposed on a first end side of the roller conveyer portion 10, and a second end side of the roller conveyer portion 10 is a free end. COPYRIGHT: (C)2008,JPO&INPIT |
