| 发明名称 |
DISPOSITIF SENSIBLE A UN MOUVEMENT COMPORTANT AU MOINS UN TRANSISTOR |
| 摘要 |
The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12). |
| 申请公布号 |
FR2901263(B1) |
申请公布日期 |
2008.10.03 |
| 申请号 |
FR20060051822 |
申请日期 |
2006.05.18 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE INDUSTRIEL ET COMMERCIAL |
发明人 |
OLLIER ERIC;DURAFFOURG LAURENT;ANDREUCCI PHILIPPE |
| 分类号 |
B81B7/02;G01P15/135;G01P15/18;H01L29/78 |
主分类号 |
B81B7/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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