| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma processing method using a radial line slot antenna, for preventing abnormal discharge by improving close contact between a slow-wave plate in the antenna and a slot plate as part of a microwave radiation plane. <P>SOLUTION: The slot plate 16 is formed of a material having a thermal expansion coefficient approximate to that of the slow-wave plate 18. Otherwise, the slot plate 16 is formed by depositing metal onto a dielectric board as part of the slow-wave plate 18. <P>COPYRIGHT: (C)2009,JPO&INPIT |
