| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus which can move a substrate that is not located on a substrate carry-in sensor, a substrate carry-out sensor, or a substrate waiting sensor in the conveyance passage of the substrate conveyance apparatus onto the respective sensors safely and surely under automatic control without directly gripping the substrate with hands when the manufacturing line stops due to occurrence of failure. <P>SOLUTION: The substrate conveyance apparatus includes rotation control switches 12A and 12B that forcibly rotate a conveyance motor 106 and place substrates in the conveyance passage onto a substrate carry-in sensor 112, a substrate carry-out sensor 114, or a substrate waiting sensor 116; and a carry-in/-out inhibition switch 12C that inhibits the substrate from being carried in the conveyance passage from the outside and being carried out to the outside from the conveyance passage. <P>COPYRIGHT: (C)2009,JPO&INPIT |
