| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multi-layered ceramics substrate, capable of suppressing the generation of air gaps around an inner conductor and easy to remove residue after firing a contraction suppressing material while permitting the improvement of dimensional accuracy, surface flatness or the like. <P>SOLUTION: A plurality of green sheets 1a-1d for substrate, which will become a glass-ceramics layer in which filler is mixed/dispersed into glass matrix by the firing, are laminated and a contraction suppressing green sheet 5 is arranged on at least one surface of the green sheet laminate for the laminated substrate to fire them. A through hole is formed in at least one part of the green sheets 1a-1d for substrate and conductive paste is filled into the through hole to fire. In this case, sheet type alumina filler is added to the green sheet for substrate, in which the through hole is formed and the conductive paste is filled thereinto as the filler. <P>COPYRIGHT: (C)2009,JPO&INPIT |
