| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acid dissociable group-bearing polymer that has high radiation transparency and satisfies the basic performance required for resists, and obtain a radiation-sensitive resin composition. <P>SOLUTION: The acid dissociating group-bearing polymer has recurring units represented by formula (1) (wherein (n) is 0 or 1). The radiation-sensitive resin composition contains the polymer. The radiation-sensitive resin composition comprises the polymer and a radiation-sensitive acid-dissociation agent. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
