| 发明名称 |
PHOTO ACID-GENERATING AGENT, PRODUCTION METHOD THEREOF AND RESIN COMPOSITION FOR PHOTO LITHOGRAPHY |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photo acid-generating agent and the like, corresponding to non-ionic i line (UV), excellent in solubility to resins, and easily producible. <P>SOLUTION: The photo acid-generating agent is represented by formula (I) (wherein, x is an integer of 1-8; and y is an integer of 3-17). <P>COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2008266495(A) |
申请公布日期 |
2008.11.06 |
| 申请号 |
JP20070113102 |
申请日期 |
2007.04.23 |
| 申请人 |
SANBO CHEMICAL IND CO LTD;OSAKA PREFECTURE UNIV |
发明人 |
SHIRAI MASAMITSU;OKAMURA HARUYUKI;TAKAHASHI MAKOTO |
| 分类号 |
C09K3/00;C07D495/04;G03F7/031 |
主分类号 |
C09K3/00 |
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