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发明名称
粘着带贴附方法及利用该方法的黏着带贴附装置
摘要
本发明系一种黏着带贴附装置,其具备有:吸住台,载置并保持基板;带供应手段,从具备有第1分离片及第2分离片之双面黏着带将第1分离片剥离并供应于吸住台上;贴附辊子,在第1分离片被剥离的状态下,将供应于吸住台上的双面黏着带从第2分离片侧按压并转动,使贴附于基板的表面;分离片回收手段,将在贴附辊子卷绕反转之第2分离片随着贴附前进移动从双面黏着带剥离,而与贴附辊子的贴附前进移动同步卷绕;以及带切断机构,将贴附于基板之双面黏着带沿着基板的外形行走。
申请公布号
TW200845286
申请公布日期
2008.11.16
申请号
TW097101090
申请日期
2008.01.11
申请人
日东电工股份有限公司
发明人
山本雅之;长谷幸敏
分类号
H01L21/683(2006.01);H01L21/304(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
何金涂;何秋远
主权项
地址
日本
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