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发明名称
湿式清洗设备用之混杂复合晶圆载具
摘要
一支持基板用之载具,处理时将该载具穿过一由上部与下部近接头形成之弯液面。该载具包括一框架,该框架具有一标定大小接受一基板用之一开口部,以及数个于该开口部内支撑该基板之支撑销,该开口部稍微比该基板大以使一间隙存在于该基板与该开口部之间。该框架包含一复合核心部、一顶部板片、一底部板片、一层之芳香族聚醯胺织物位于该顶部板片与该核心部之间及一第二层之芳香族聚醯胺织物位于该底部板片与该核心部之间。该顶部板片与该底部板片由一高分子材料形成。亦叙述一种制造方法。
申请公布号
TW200845271
申请公布日期
2008.11.16
申请号
TW096149331
申请日期
2007.12.21
申请人
兰姆研究公司
发明人
郑文老;阿诺德 科洛丹可
分类号
H01L21/673(2006.01)
主分类号
H01L21/673(2006.01)
代理机构
代理人
许峻荣
主权项
地址
美国
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