| 发明名称 |
REMOTE MAINTENANCE SYSTEM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a remote maintenance system which allows device information accumulated in each semiconductor manufacturing inspection device to be safely released to a maintenance operator, within permission of a user of the semiconductor manufacturing inspection device. <P>SOLUTION: A management device is constituted so that device information indicating symptoms of trouble in the semiconductor manufacturing inspection device is encrypted using a specific common key to transmit it to a work device according to demands from the work device, the common key is encrypted using a public key related with the work device to transmit it to the work device, and the work device decrypts the common key using a private key related with the public key to decrypt the device information encrypted using the common key. <P>COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2008288602(A) |
申请公布日期 |
2008.11.27 |
| 申请号 |
JP20080154797 |
申请日期 |
2008.06.13 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
ARIMA JUNTARO;IIIZUMI TAKASHI;INABA MASAAKI |
| 分类号 |
H01L21/02;G06Q10/00;G06Q50/00;G06Q50/10;H04L9/08 |
主分类号 |
H01L21/02 |
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