发明名称 PLASMA GENERATION SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide a plasma generation system for preventing leakage of water from a piping section where a cooling water flows. <P>SOLUTION: The cooling water is made to flow such that a first cylindrical anode 21A is arranged at one end of a case 15 via an insulator 20 and flanges 26A, 26B are respectively mounted on the other end of the case 15 via insulators 25A', 25B' and flow passages 28, 30 arranged inside pipings 27, 31, respectively connected with the flanges 26A, 26B and the case 15 and a flow passage 29 formed inside the first anode 21A are set up to spatially connect with each other. An exchange flange 30C wherein concentric grooves M7a, M7b are formed at an insulator 20 side is arranged between the first anode 21A and the insulator 20, exchange flanges 30A, 30b wherein concentric grooves M1a, M1b, M2a, M2b are respectively formed at respective insulators 25A', 25B' sides are arranged between respective flanges 26A, 26B and insulators 25A', 25B', and seal members are inserted into the respective grooves. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008293829(A) 申请公布日期 2008.12.04
申请号 JP20070138895 申请日期 2007.05.25
申请人 JEOL LTD 发明人 TAKASHIMA TORU;MANO YOSHIO
分类号 H05H1/24;C23C14/32 主分类号 H05H1/24
代理机构 代理人
主权项
地址