| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pre-treatment method of a substrate in the organic EL element manufacturing method in which an appropriate surface treatment to a transparent electrode of metal oxide formed on the substrate can be carried out as well as removal of moisture. <P>SOLUTION: In the organic EL element manufacturing method to laminate and form a layer to constitute an organic EL element on a substrate formed with a transparent electrode of ITO in the order, the substrate P is housed in a baking chamber 15 provided with a heater 22. Then, while introducing a mixed gas of oxygen and nitrogen so as to replace a gas in the baking chamber 15, heating treatment of the substrate P is performed, and the introduction speed of the mixed gas is established to be a speed in which the introduction amount to the baking chamber 15 per one minute is 1/60 or more and 1/15 or less of the total volume of the baking chamber 15. The ratio of oxygen and nitrogen in the mixed gas is in a volume ratio of oxygen:inert gas, 1.8:8.2-3.0:7.0. <P>COPYRIGHT: (C)2009,JPO&INPIT |
