| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic recording medium for improving material workability, reducing mask damage even when an organic resist mask is used, reducing change of a pattern size and having stable magnetic characteristics and to provide a manufacturing method thereof by which the magnetic recording medium can be efficiently manufactured. SOLUTION: The manufacturing method of the magnetic recording medium includes an irregular pattern forming step for forming an irregular pattern on a resist layer of the magnetic recording medium having the resist layer and a magnetic layer in this order on the surface of a substrate for the magnetic recording medium and a dry etching step for forming an irregular shape on the magnetic layer by performing dry etching using argon ions generated by introducing gaseous argon into a high density plasma source using the irregular pattern of the resist layer as a mask. COPYRIGHT: (C)2009,JPO&INPIT
|
