| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the electrical characteristics of a semiconductor element at high temperatures. SOLUTION: A measuring apparatus includes a holding device for holding a measurement target having the semiconductor element; a measuring head which is opposed to the measurement target held by the holding device and includes a measuring device for measuring the electrical characteristics of the semiconductor element, the measuring device being electrically connected to the semiconductor element; a first air duct which is provided in the measuring head and has an air vent opened to the measuring device; and an air blower which is connected to the first air duct and blows cooling air to the measuring device through the first air duct. COPYRIGHT: (C)2009,JPO&INPIT
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