发明名称 VARIABLE FILTER DEVICE AND CONFOCAL MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a variable filter device for shielding efficiently a specified wavelength of light. SOLUTION: A divergent beam passing through an incident pinhole plate 2 is converted into a parallel beam by a collimating lens 3, and enters an acousto-optical variable filter 4. The acousto-optical variable filter 4 is applied with a prescribed frequency of voltage to serve as a diffraction grating, a diffraction light is emitted diagonally to an optical axis as shown by a dotted line, and only a zeroth order light travels straight. The light beam emitted from the acousto-optical variable filter 4 is converged by a convergence lens 5, and the zeroth order light passes through a pinhole of an emission pinhole plate 6, and is emitted toward the outside of the variable filter device 1. The diffraction light collides with a plate part of the emission pinhole plate 6 to be shielded, and is not emitted toward the outside of the variable filter device 1. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008299207(A) 申请公布日期 2008.12.11
申请号 JP20070147087 申请日期 2007.06.01
申请人 NIKON CORP 发明人 AIKAWA NAOSHI;YOSHIDA YUKI
分类号 G02B21/00;G01N21/64;G02B21/16 主分类号 G02B21/00
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