| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and light-weight scanning distance measuring instrument for realizing a wide-range and high-speed two-dimensional scans. SOLUTION: Laser light outputted from a laser output part 1 is transmitted and caused by a scanning mechanism for two-dimensionally scanning in a first direction and in a second direction orthogonal to the first direction, and the laser light reflected by a measuring object is received. By this scanning mechanism, the laser light is caused to scan in the first direction, by driving a polygonal mirror 3 with a first scan actuator so as to endlessly rotate around a first scan rotation axis, at all times, while the laser light is caused to scan in the second direction by driving a scan mirror base, comprising the first scan actuator and the polygon mirror 3, by a second scan actuator so as to endlessly rotate about a second scan rotation axis which is orthogonal to the first scan rotation axis. COPYRIGHT: (C)2009,JPO&INPIT
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